@misc{218571,
  author = {John Villarrubia},
  title = {Uncertainties in Nanometer-Scale Dimensional Metrology},
  year = {2016},
  month = {2016-07-01},
  publisher = {NIST Materials Science Lab Portal},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920183},
  language = {en},
}