@article{21806,
  author = {Shinichiro Muramoto and Timothy Brewer and Matthew Staymates and John Gillen},
  title = {Ambient Low Temperature Plasma Etching of Polymer Films for Virtually Damage-free SIMS Molecular Depth Profiling},
  year = {2012},
  month = {2012-11-08},
  publisher = {Analytical Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911996},
  language = {en},
}