@article{217646,
  author = {Adam Hannon and Daniel Sunday and Donald Windover and Regis Kline},
  title = {Advancing X-Ray Scattering Metrology Using Inverse Genetic Algorithms},
  year = {2016},
  number = {15},
  month = {2016-07-07},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  doi = {https://doi.org/10.1117/1.JMM.15.3.034001},
  language = {en},
}