@article{217561,
  author = {Ravikiran Attota and Peter Weck and John Kramar and Bunday Benjamin and Victor Vartanian},
  title = {Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy},
  year = {2016},
  month = {2016-07-14},
  publisher = {Optics Express},
  doi = {https://doi.org/10.1364/OE.24.016574},
  language = {en},
}