@conference{216761,
  author = {Ronald Dixson and Ryan Goldband and Ndubuisi Orji},
  title = {Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit},
  year = {2015},
  number = {9636},
  month = {2015-10-21},
  publisher = {SPIE Proceedings: Scanning Microscopies 2015, Monterey , CA},
  doi = {https://doi.org/10.1117/12.2199169},
  language = {en},
}