@article{216656,
  author = {Ronald Dixson and Ndubuisi Orji and Ryan Goldband},
  title = {Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit},
  year = {2016},
  number = {15},
  month = {2016-01-25},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  language = {en},
}