@article{215801,
  author = {Tariq Ahmido and William Kimes and Brent Sperling and Joseph Hodges and James Maslar},
  title = {In-Situ Metrology to Characterize Water Vapor Delivery during Atomic Layer Deposition},
  year = {2016},
  month = {2016-05-02},
  publisher = {Journal of Vacuum Science and Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920093},
  language = {en},
}