@article{215456, author = {Charles Tilford and Charles Ehrlich and K McCulloh and F Long}, title = {Low-range flowmeters for use with vacuum and leak standards}, year = {1987}, month = {1987-05-01}, publisher = {Journal of Vacuum Science & Technology A}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921267}, language = {en}, }