@article{215246, author = {Seongshik Oh and Dustin Hite and Katarina Cicak and Kevin Osborn and Raymond Simmonds and Robert Mcdermott and Ken Cooper and Matthias Steffen and John Martinis and David Pappas}, title = {Epitaxial growth of rhenium with sputtering}, year = {2005}, number = {496}, month = {2005-10-06}, publisher = {Thin Solid Films}, doi = {https://doi.org/10.1016/j.tsf.2005.09.091}, language = {en}, }