@article{215216, author = {Ronald Dixson and William Guthrie and Richard Allen and Ndubuisi Orji and Michael Cresswell and Christine Murabito}, title = {Process Optimization for Lattice-Selective Wet Etching of Crystalline Silicon Structures}, year = {2016}, number = {15}, month = {2016-03-09}, publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919919}, language = {en}, }