@article{215166,
  author = {S Tison},
  title = {A critical evalution of thermal mass flow meters},
  year = {1996},
  month = {1996-01-05},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920804},
  language = {en},
}