@conference{214751, author = {Ward Johnson and Thomas Wallis and Pavel Kabos and Eduard Rocas and Juan Collado and Li-Anne Liew and Albert Davydov and Alivia Plankis and Paul Heyliger}, title = {A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide}, year = {2012}, month = {2012-05-21}, publisher = {IEEE Frequency Control Symposium, Baltimore, MD}, doi = {https://doi.org/10.1109/FCS.2012.6243722}, language = {en}, }