@conference{21391, author = {Bradley Damazo and Bin Ming and Premsagar Kavuri and Andras Vladar and Michael Postek}, title = {Accurate Nanometer-Scale Imaging and Measurements with SEM}, year = {2011}, number = {2011}, month = {2011-08-18}, publisher = {IEEE Nano 2011, Portland, OR}, doi = {https://doi.org/10.1109/NANO.2011.6144666}, language = {en}, }