@conference{213771,
  author = {Thomas Wallis and Atif Imtiaz and Alexandra Curtin and Pavel Kabos and Matthew Brubaker and Norman Sanford and Kristine Bertness},
  title = {Spatially-Resolved Dopant Characterization with a Scanning Microwave Microscope},
  year = {2013},
  month = {2013-03-25},
  publisher = {Digest of the 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912802},
  language = {en},
}