@conference{212261,
  author = {Michael Postek and Andras Vladar},
  title = {Nanomanufacturing Concerns about Measurements Made in the SEM Part IV: Charging and its Mitigation},
  year = {2015},
  month = {2015-11-17},
  publisher = {Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, CA},
  language = {en},
}