@article{212066, author = {Eduard Rocas and Juan Collado and Jordi Mateu and Nathan Orloff and Alberto Padilla and Juan Callaghan and James Booth and Robert Aigner}, title = {Third order Intermodulation Distortion in Film Bulk Acoustic Resonators at Resonance and Antiresonance}, year = {2008}, month = {2008-06-15}, publisher = {IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control}, doi = {https://doi.org/10.1109/MWSYM.2008.4633288}, language = {en}, }