@article{211801,
  author = {Michael Vissers and Jiansong Gao and Jeffrey Kline and Martin Sandberg and Martin Weides and David Wisbey and David Pappas},
  title = {Characterization and In-situ Monitoring of Sub-stoichiometric Adjustable TC Titanium Nitride Growth},
  year = {2012},
  month = {2012-09-21},
  publisher = {Thin Solid Films},
  doi = {https://doi.org/10.1016/j.tsf.2013.07.046},
  language = {en},
}