@article{211241,
  author = {Shannon Duff and Gene Hilton and Johannes Hubmayr and James Beall and Jason Austermann and Daniel Becker and Jeffrey Van},
  title = {Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers},
  year = {2015},
  month = {2015-07-22},
  publisher = {Journal of Low Temperature Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919372},
  language = {en},
}