@article{210436,
  author = {Ndubuisi Orji and Hiroshi Itoh and Chumei and Ronald Dixson and Sebastian Schmidt and Bernd Irmer and Peter Walecki},
  title = {Tip characterization method using multi-feature characterizer for CD-AFM},
  year = {2015},
  number = {162},
  month = {2015-12-23},
  publisher = {Ultramicroscopy},
  doi = {https://doi.org/10.1016/j.ultramic.2015.12.003},
  language = {en},
}