@conference{20981,
  author = {Liya Yu and Richard Kasica and Robert Newby and Lei Chen and Vincent Luciani},
  title = {The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure},
  year = {2013},
  number = {8682},
  month = {2013-03-29},
  publisher = {SPIE Advanced Lithography, San Jose, CA},
  doi = {https://doi.org/10.1117/12.2011681},
  language = {en},
}