@article{209616,
  author = {Justin Shaw and Kathleen Hoogeboom-Pot and Jorge Hernandez-Charpak and Henry Kapteyn and Margaret Murnane and Damiano Nardi},
  title = {Nondestructive measurement of the evolution of layer-specific mechanical properties in sub-10nm bilayer films},
  year = {2015},
  month = {2015-04-21},
  publisher = {Applied Physics Letters},
  language = {en},
}