@article{209001,
  author = {Mark and Richard Silver and John Villarrubia and Nien Zhang and Hui Zhou and Bryan Barnes and Andras Vladar and Bin Ming},
  title = {Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.},
  year = {2015},
  number = {14},
  month = {2015-11-12},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  doi = {https://doi.org/10.1117/1.JMM.14.4.044001},
  language = {en},
}