@conference{208396,
  author = {Bryan Barnes and Mark and Martin Sohn and Hui Zhou and Richard Silver},
  title = {Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets},
  year = {2016},
  number = {9778},
  month = {2016-04-04},
  publisher = {Proceedings of the SPIE, San Jose, CA},
  doi = {https://doi.org/10.1117/12.2221920},
  language = {en},
}