@conference{208091,
  author = {Richard Silver and Bryan Barnes and Martin Sohn and Hui Zhou},
  title = {Scatterfield Microscopy and the Fundamental Limits of Optical Defect Metrology},
  year = {2015},
  month = {2015-04-14},
  publisher = {2015 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Dresden, -1},
  language = {en},
}