@misc{207886,
  author = {Charles Tarrio},
  title = {Method for the characterization of extreme-ultraviolet photoresist outgassing},
  year = {2009},
  number = {114},
  month = {2009-05-01},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842566},
  language = {en},
}