@conference{20766,
  author = {Bryan Barnes and Francois Goasmat and Martin Sohn and Hui Zhou and Abraham Arceo},
  title = {Enhancing 9 nm Node Dense Patterned Defect Optical Inspection using Polarization, Angle, and Focus},
  year = {2013},
  number = {8681},
  month = {2013-04-10},
  publisher = {Proceedings of the SPIE, San Jose, CA},
  doi = {https://doi.org/10.1117/12.2012250},
  language = {en},
}