@conference{207601, author = {Martin Sohn and Bryan Barnes and Hui Zhou and Richard Silver}, title = {Quantitative tool characterization of a 193 nm scatterfield microscope}, year = {2015}, number = {9556}, month = {2015-09-09}, publisher = {Nanoengineering: Fabrication, Properties, Optics, and Devices XII, San Diego, CA}, doi = {https://doi.org/10.1117/12.2188224}, language = {en}, }