@article{20676,
  author = {Robert Berg},
  title = {Quartz capillary flow meter for gases},
  year = {2004},
  number = {75},
  month = {2004-03-01},
  publisher = {Review of Scientific Instruments},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915338},
  language = {en},
}