@conference{206711,
  author = {Jay Hendricks and M Aquino-Class and Michael Zachariah},
  title = {A New Low Temperature Chemical Vapor Deposition Technique For Growing Thin Films of Ti, TiN on Copper and TiO2, TixSiy on Silicon},
  year = {1999},
  number = {555},
  month = {1999-12-01},
  publisher = {Materials Research Society Proceedings},
  language = {en},
}