@article{206706, author = {Jay Hendricks and M Aquino-Class and James Maslar and Michael Zachariah}, title = {Metal and Ceramic Thin Film Growth by Reaction of Alkali Metals with Metal Halides: A New Route for Low Temperature CVD}, year = {1998}, number = {No. 10}, month = {1998-07-01}, publisher = {Chemistry of Materials}, language = {en}, }