@article{206701, author = {Kristen and Mark Sobolewski}, title = {Planar Laser-Induced Fluorescence of CF2 in O2/CF4 and O2/C2F6 Chamber-Cleaning Plasmas: Spatial Uniformity and Comparison to Electrical Measurements}, year = {1999}, number = {17}, month = {1999-03-01}, publisher = {Journal of Vacuum Science and Technology A}, language = {en}, }