@article{206701,
author = {Kristen and Mark Sobolewski},
title = {Planar Laser-Induced Fluorescence of CF2 in O2/CF4 and O2/C2F6 Chamber-Cleaning Plasmas: Spatial Uniformity and Comparison to Electrical Measurements},
year = {1999},
number = {17},
month = {1999-03-01},
publisher = {Journal of Vacuum Science and Technology A},
language = {en},
}