@misc{205911,
  author = {Stephen Knight and Joaquin Martinez and Yaw Obeng and Michele Buckley},
  title = {Semiconductor Microelectronics and Nanoelectronics Programs},
  year = {2008},
  month = {2008-07-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7513},
  language = {en},
}