@conference{204001,
  author = {Stephen Knight},
  title = {Overview of Metrology for the Semiconductor Industry at the National Institute of Standards and Technology},
  year = {2003},
  number = {1},
  month = {2003-04-04},
  publisher = {GOMAC Tech-: Countering Asymmetric Threats, Tampa, FL},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31263},
  language = {en},
}