@conference{202681,
  author = {Stephen Knight},
  title = {Development of Metrology at NIST For the Semiconductor Industry},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {Characterization and Metrology for ULSI Technology, Austin, TX},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31402},
  language = {en},
}