@conference{20221, author = {Lin You and Emily Hitz and Jungjoon Ahn and Yaw Obeng and Joseph Kopanski}, title = {Back-End-of-Line Test Structure Design and Simulation for Subsurface Metrology with Scanning Probe Microscopy}, year = {2013}, month = {2013-12-13}, publisher = {2013 International Semiconductor Device Research Symposium, Bethesda, MD}, language = {en}, }