@article{202111,
  author = {David Seiler},
  title = {Special Section on the International Conference on Frontiers of Characterization and Metrology for Nanoelectronics},
  year = {2006},
  month = {2006-11-01},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32443},
  language = {en},
}