@conference{200711,
  author = {Eric Vogel},
  title = {Physical Mechanisms of Ultra-thin Silicon Dioxide Degradation and Breakdown},
  year = {2005},
  number = {2005},
  month = {2005-01-30},
  publisher = {Proceedings of the 8th International Symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films and Other Emerging Dielectrics},
  language = {en},
}