@misc{199841,
  author = {John Albers},
  title = {Semiconductor Measurement Technology: Version 2.0 of the TXYZ Thermal Analysis Program: TXYZ20},
  year = {1992},
  number = {400},
  month = {1992-06-01},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}