@article{198596,
  author = {James Ehrstein},
  title = {[Papers from the] Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors,},
  year = {1996},
  number = {B 14},
  month = {1996-02-01},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}