@conference{198396,
  author = {Brian Rennex},
  title = {Fourier Transform Infrared (FTIR) Determination of Interstitial Oxygen Concentration of Single-Side-Polished Silicon Wafers},
  year = {1989},
  number = {1145},
  month = {1989-12-31},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Fourier Transform Spectroscopy VII, Fairfax, VA},
  language = {en},
}