@conference{198186,
  author = {John Suehle},
  title = {Reliability Characterization of Ultra-Thin Film Dielectrics},
  year = {1998},
  month = {1998-12-31},
  publisher = {Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD},
  language = {en},
}