@misc{197876,
  author = {M. Young},
  title = {Linearity and resolution of refracted near-field scanning technique},
  year = {1980},
  month = {1980-10-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=11400},
  language = {en},
}