@conference{197686,
  author = {Kristine Bertness and Lawrence Robins and J Armstrong and Ryna Marinenko and Albert Paul and Marc Salit},
  title = {Composition standards for III-V semiconductor epitaxial films},
  year = {2002},
  month = {2002-11-11},
  publisher = {Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30845},
  language = {en},
}