@conference{197056,
  author = {James Potzick},
  title = {Automated Calibration of Optical Photomask Linewidth Standards at the National Institute of Standards and Technology},
  year = {1989},
  number = {1087},
  month = {1989-12-31},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control III, Los Angeles, CA},
  language = {en},
}