@conference{196826,
  author = {Gordon Day},
  title = {Metrology for the Optoelectronics Industry},
  year = {2001},
  number = {4450},
  month = {2001-07-01},
  publisher = {Proc., SPIE, Harnessing Light,  Optical Science and Metrology at NIST, San Diego, CA},
  language = {en},
}