@conference{19626,
  author = {Michael Postek and Andras Vladar},
  title = {Nanomanufacturing concerns about Measurements made in the SEM I: Imaging and its Measurement},
  year = {2013},
  month = {2013-11-01},
  publisher = {Nanomanufacturing concerns about Measurements made in the SEM I: Imaging and its Measurement, San Diego, CA},
  language = {en},
}