@conference{19621,
  author = {Michael Postek and Andras Vladar and Premsagar Kavuri},
  title = {Nanomanufacturing Concerns about Measurements made in the SEM II: Specimen Contamination},
  year = {2013},
  month = {2013-11-01},
  publisher = {SPIE/Nanomanufacturing 2013, San Diego, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914028},
  language = {en},
}