@article{195451, author = {Kristine Bertness}, title = {Overview of the IEEE/LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing}, year = {2000}, number = {14}, month = {2000-10-01}, publisher = {IEEE Lasers and Electro-Optics Society Newsletter}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=13866}, language = {en}, }