@misc{195351,
  author = {John Albers},
  title = {Semiconductor Measurement Technology: HOTPAC: Programs for Thermal Analysis Including Version 3.0 of the TXYZ Program, TXYZ30, and the Thermal MultiLayer Program, TML},
  year = {1995},
  number = {400},
  month = {1995-08-01},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}