@misc{195321,
  author = {Kristine Bertness and Susan Lehman and Joseph Hodges},
  title = {Moisture measurements in semiconductor process gases using cavity ring-down spectroscopy},
  year = {2003},
  month = {2003-03-01},
  publisher = {Gases & Technology Magazine},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31298},
  language = {en},
}